Air Floating Technology

Non-contact ceramic porous table for OLED substrate transfer for inkjet application

Our ceramic porous table allows transfer glasses through air from ceramic micro holes without the contact. The unique design of ceramic porous table provides uniform floating level across the substrate.

 

– Protection from surface scratch when transferring glass 

– Prevent from Mura defect due to glass deformation caused by flatness and heat imbalance

We customize the solution to meet customer’s specification.

Material
Ceramic & Aluminum

Anti-static
Material surface resistance: 10⁵ ~ 10⁹Ω

Particle
Class 10(ISO 4)

Size 
G2 ~ G11 gantry stage for Display

Semiconductor, Imprint, LED stage that requires non-contact transportation of substrate to the process area. 

Application
FPD, Semiconductor, Factory Automation