Precision Stage

We manufacture customized precision stage for display and semiconductor equipment makers. We started as an air-bearing maker and supplied customized air-bearings to stage makers. We collaborate with world best controller makers and select high class precision parts from major brands for the ultra precision accuracy. Based on our specialty and experiences, we make stages that requires highly customized function and specification which no major stage makers want to even consider making it. Contact us and let us know your needs.

Air bearing stage for vacuum application

Higher Dynamic Stiffness / High Load Capacity

G2 to G11 size stages

X-Y-Z, Gantry type stages available

Steel Frame Stages available

Customer can specify a controller (i.e., ACS)

LCD Cell Repair, Optical Inspection, Micro Machining
Wafer metrology systems
In-line material handling