Gas Purification System (Circulation Purifier, Solvent Trap, Piping, and Gas Monitoring System) provides pure gas in semiconductor, FPD, LED, and solar manufacturing process. Our qualified purification system uses Getter material, Alumina, Zeolite, and etc. to absorb impurities (N2, H2, H2O, CO, CO2, O2, He, Ar). Our solution allows pure gas to circulate between chamber and the system to minimize the cost of processing gas. We customize the solution to meet customer’s specification.
N2, H2, H2O, CO, CO2, O2, He, Ar < 1ppm
Size of Chamber
5m³, 10m³ , 20m³ , 30m³ , 50m³ , 100m³ / Custom size and configuration
Mitsubishi / Omron / Customer request
S2 / CE / S-Mark / EMI / EMS
Comply to Tier1 FPD and Semiconductor fab customer’s requirement. Approved by customers.
SUS 304 & SUS 316 Piping
For more details of specification, please send us the request at firstname.lastname@example.org