Gas Purification System

Gas Purification System (Circulation Purifier, Solvent Trap, Piping, and Gas Monitoring System) provides pure gas in semiconductor, FPD, LED, and solar manufacturing process. Our qualified purification system uses Getter material, Alumina, Zeolite, and etc. to absorb impurities (N2, H2, H2O, CO, CO2, O2, He, Ar). Our solution allows pure gas to circulate between chamber and the system to minimize the cost of processing gas. We customize the solution to meet customer’s specification.

Impurity
N2, H2, H2O, CO, CO2, O2, He, Ar < 1ppm

Size of Chamber
5m³, 10m³ , 20m³ , 30m³ , 50m³ , 100m³ / Custom size and configuration

PLC
Mitsubishi / Omron / Customer request

Certification
S2 / CE / S-Mark / EMI / EMS

Safety feature
Comply to Tier1 FPD and Semiconductor fab customer’s requirement. Approved by customers. 

Pipe Material
SUS 304 & SUS 316 Piping

For more details of specification, please send us the request at info@onusco.com