Custom parts

Precision Machining for your development and production, we can provide

  1. 200mm and 300mm parts for semiconductor equipment
    • Vacuum chamber
    • Frames
    • Al, SUS, Chrome & Invar(36) material machining
    • SiC ring
    • Shower head
  2. FPD process equipment parts
    • welded Al or SST vacuum chamber: G2 to G11 substrate process
    • enclosure for special environment handling

Custom special function parts for your development and production, we can provide

  1. Customized Bellows : Cylinder type, Rectangular, or special shape or length
  2. Gate Valves: Any size(L & W) from 50mm to 500mm (H) Opening, for Vacuum application
  3. Vacuum valves: Manual or Auto with LOTO and proximity or mechanical sensor for safety and control. We have customized valves at any size and needs.